Structure Improvement of an XY Flexure Micromanipulator for Micro/Nano Scale Manipulation
نویسندگان
چکیده
An effort made towards the performance improvement for an XY micromanipulator featuring parallel architecture and flexure hinges has been presented in this paper. Through the implementation of four steps evolution of the original structure, a new manipulator with decoupled motion is finally obtained, which owns an enlarged workspace and eliminated stiffening and buckling phenomena. The merits of the new manipulator have been illustrated via the finite element analysis performed via ANSYS software package. It is believed that the generated flexure micromanipulator can be adopted in the applications involving manipulation of objects in microand nano-meter scales.
منابع مشابه
Design and Analysis of a New High Precision Decoupled XY Compact Parallel Micromanipulator
With the development of nanotechnology that contains automatic control, precision machinery and precise measurement, etc., micro/nano manipulation has become a new research direction in recent years. This paper presents the design and analysis procedures of a new high precision XY decoupled compact parallel micromanipulator (DCPM) for micro scale positioning applications. The DCPM is made up of...
متن کاملDecoupling Optimization of Flexure Hinge and Lever Magnifying Mechanism for an Xy Compliant Micromanipulator
The micro/nano motion stage with ultra-high precision are urgently required to perform such tasks as operation under scanning probe, bio-cell manipulation, optical fibers alighment, etc. The compliant XY micro manipulator employing flexure hinges is widely applying due to their excellent characteristics of simple structure, no backlash, no nonlinear friction, and so on [1]. Some novel compliant...
متن کاملDesign and Analysis of a Dual-Mode Driven Parallel XY Micromanipulator for Micro/Nano Manipulations
This paper presents a novel design of a flexure-based, piezoelectric (PZT) actuated, completely decou-pled, high-bandwidth, high resolution, and large stroke parallel XY micromanipulator with two amplification levers. The monolithic mechanism is featured with dual working modes, which meets different kinds of requirements in terms of high resolution and large workspace in micro/nano fields. In ...
متن کاملDesign and Optimization of an XYZ Parallel Micromanipulator with Flexure Hinges
In this paper, a nearly decoupled XYZ translational compliant parallel micromanipulator (CPM) is designed for micro/nano scale manipulation with features of piezo-driven actuators and flexure hinges. The CPM structure improvement is made to enlarge the workspace and eliminate or reduce the stress stiffening, buckling phenomenon, and parasitic motions of the original XYZ CPM, which leads to a ne...
متن کاملDynamic Modeling and Optimization of a Decoupled XY Flexure Parallel Micro-Manipulator
The architecture optimization of a newly designed flexure XY parallel micro-manipulator with both input and output decoupling is conducted in this paper. In view of the compliance of flexure hinges, the input stiffness model of the motion stage are established based upon the matrix method, and then the dynamic equation is derived through the Lagrangian approach, which is verified by the modal a...
متن کامل